共 50 条
- [21] Demonstration of damage-free mask repair using electron beam-induced processes Liang, T. (ted.liang@intel.com), PMJ - Photomask Japan; BACUS - The International Technical Group of SPIE; SPIE - International Society for Optical Engineering (SPIE):
- [22] Damage-free cathode coating process for OLEDs 2008 SID INTERNATIONAL SYMPOSIUM, DIGEST OF TECHNICAL PAPERS, VOL XXXIX, BOOKS I-III, 2008, 39 : 2046 - 2048
- [23] Demonstration of damage-free mask repair using electron beam-induces processes PHOTOMASK AND NEXT GENERATION LITHOGRAPHY MASK TECHNOLOGY XI, 2004, 5446 : 291 - 300
- [26] Damage-free processing of ceramics by plasma nanomanufacturing Toraibarojisuto/Journal of Japanese Society of Tribologists, 2018, 63 (12): : 806 - 811
- [28] Damage-free cryogenic aerosol clean processes 2006 IEEE/SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE AND WORKSHOP, 2006, : 301 - +
- [29] DEVELOPMENT OF DAMAGE-FREE LEVEL TRANSFERS. Proceedings of the Institution of Mechanical Engineers. Part B. Management and engineering manufacture, 1987, 201 B2 : 91 - 97