Phase-shifting interferometric profilometry with a wavelength-tunable diode source

被引：0
|
作者：
Takeshi Takahashi
Yukihiro Ishii
Ribun Onodera
机构：
[1] Polytechnic University,Department of Electronic and Information Systems Engineering
[2] Tokyo University of Science,Department of Applied Physics
[3] RIKEN,Photonics Control Technology Team
来源：
Optical Review | 2014年 / 21卷
关键词：
phase-shifting interferometry; tunable laser diode; profilometry; Carré algorithm;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A phase-shifting interferometer with a tunable external-cavity laser diode has been constructed for forming three-dimensional (3-D) phase profiles. The interference phase is shifted equally in four steps by varying the source wavelength. Profilometry is achieved by measuring the phase shifts that are extracted by the Carré algorithm. The linear regression of the distance measurement from 40 μm to 13mm has been experimentally demonstrated by phase-shifting interferometry. A laser-diode interferometer has been applied to 3-D profile measurement for a step-mirror object at a deep depth.
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页码：410 / 414
页数：4
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