Internal Stresses in Mo/Y Multilayer Mirrors

被引：0
|
作者：
D. S. Kvashennikov
Yu. A. Vainer
S. Yu. Zuev
V. N. Polkovnikov
机构：
[1] Institute for Physics of Microstructures of the Russian Academy of Sciences,
来源：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2019年 / 13卷
关键词：
multilayer mirrors; X-ray optics; internal stress; magnetron sputtering;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：177 / 181
页数：4
相关论文
共 50 条
  • [21] Structure and performance of Si/Mo multilayer mirrors for the extreme ultraviolet
    Slaughter, J.M.
    Schulze, Dean W.
    Hills, C.R.
    Mirone, A.
    Stalio, R.
    Watts, R.N.
    Tarrio, C.
    Lucatorto, T.B.
    Krumrey, M.
    Mueller, P.
    Falco, Charles M.
    Journal of Applied Physics, 1994, 76 (04): : 2144 - 2156
  • [22] Developments in realistic design for aperiodic Mo/Si multilayer mirrors
    Aquila, A. L.
    Salmassi, F.
    Dollar, F.
    Liu, Y.
    Gullikson, M.
    OPTICS EXPRESS, 2006, 14 (21): : 10073 - 10078
  • [23] IN-SITU REFLECTANCE MEASUREMENTS OF SOFT-X-RAY EXTREME-ULTRAVIOLET MO/Y MULTILAYER MIRRORS
    MONTCALM, C
    SULLIVAN, BT
    DUGUAY, S
    RANGER, M
    STEFFENS, W
    PEPIN, H
    CHAKER, M
    OPTICS LETTERS, 1995, 20 (12) : 1450 - 1452
  • [24] Mo/Si multilayer mirrors with 300-bilayers for EUV lithography
    Ichimaru, Satoshi
    Hatayama, Masatoshi
    Ohchi, Tadayuki
    Oku, Satoshi
    PHOTOMASK JAPAN 2015: PHOTOMASK AND NEXT-GENERATION LITHOGRAPHY MASK TECHNOLOGY XXII, 2015, 9658
  • [25] Investigation of microstructure and reflectivity of thermally annealed Mo/Be and W/Be multilayer mirrors
    Kumar, Niranjan
    Pleshkov, Roman S.
    Garakhin, Sergai A.
    Nezhdanov, Aleksey, V
    Yunin, Pavel A.
    Polkovnikov, Vladimir N.
    Chkhalo, Nikolay, I
    SURFACES AND INTERFACES, 2022, 28
  • [26] Influence of Beryllium Barrier Layers on the Properties of Mo/Si Multilayer Mirrors
    Zuev, S. Yu
    Pleshkov, R. S.
    Polkovnikov, V. N.
    Salashchenko, N. N.
    Svechnikov, M., V
    Chkhalo, N., I
    Schaefers, F.
    Sertsu, M. G.
    Sokolov, A.
    TECHNICAL PHYSICS, 2019, 64 (11) : 1688 - 1691
  • [27] Influence of Beryllium Barrier Layers on the Properties of Mo/Si Multilayer Mirrors
    S. Yu. Zuev
    R. S. Pleshkov
    V. N. Polkovnikov
    N. N. Salashchenko
    M. V. Svechnikov
    N. I. Chkhalo
    F. Schäfers
    M. G. Sertsu
    A. Sokolov
    Technical Physics, 2019, 64 : 1688 - 1691
  • [28] STRUCTURE AND PERFORMANCE OF SI/MO MULTILAYER MIRRORS FOR THE EXTREME-ULTRAVIOLET
    SLAUGHTER, JM
    SCHULZE, DW
    HILLS, CR
    MIRONE, A
    STALIO, R
    WATTS, RN
    TARRIO, C
    LUCATORTO, TB
    KRUMREY, M
    MUELLER, P
    FALCO, CM
    JOURNAL OF APPLIED PHYSICS, 1994, 76 (04) : 2144 - 2156
  • [29] MEASUREMENT OF INTERNAL STRESSES OF METAL MULTILAYER COMPOSITE COATINGS
    顾卓明
    JournalofWuhanUniversityofTechnology-MaterialsScience, 1997, (Z1) : 33 - 36
  • [30] Measurement of internal stresses of metal multilayer composite coatings
    Gu, Zhuoming
    Journal Wuhan University of Technology, Materials Science Edition, 1997, 12 (1-2): : 33 - 36
12345