Internal Stresses in Mo/Y Multilayer Mirrors

被引：0
|
作者：
D. S. Kvashennikov
Yu. A. Vainer
S. Yu. Zuev
V. N. Polkovnikov
机构：
[1] Institute for Physics of Microstructures of the Russian Academy of Sciences,
来源：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2019年 / 13卷
关键词：
multilayer mirrors; X-ray optics; internal stress; magnetron sputtering;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
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页码：177 / 181
页数：4
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