The effect of electromagnetic fields on the process of formation of ultrathin Fe-Ni films during their deposition under a plasma-stimulated deposition

The effect of electromagnetic fields and a current flowing across the films during the growth process on their crystalline structure and electrical, magnetic, and galvanomagnetic properties is investigated. Under the optimal parameters of the deposition process, polycrystalline, magnetic, and conducting films of permalloy at least 1.7 nm thick are obtained. Two critical thicknesses of the films are established, at which the scattering mechanisms of the conduction electrons vary. © 2009 Pleiades Publishing, Ltd.