Analysis of Parameters of an RF Inductively Coupled Plasma Torch and Dispersed Flow of Vaporized Quartz Particles

被引：0
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作者：
L. Miao
Yu. M. Grishin
机构：
[1] Bauman Moscow State Technical University,
来源：
Technical Physics | 2020年 / 65卷
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页码：1024 / 1031
页数：7
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