Magnetic-field sensors based on anisotropic magnetoresistive thin-film structures for operation in a wide temperature range

The results of studies on the fabrication and optimization of the configuration of magnetic-field sensors based on anisotropic magnetoresistive thin-film structures are described. Magnetic-field sensors with an odd characteristic and a sensitivity to 23.7 (mV/V)/(kA/m) and a 180° angle-rotation sensor with a signal amplitude of 15 mV/V are obtained. Based on the performed thermal tests, the possibility of applying the developed sensors in extreme environments in the temperature range from –60 to +150°C is shown, and the temperature-sensitivity coefficient amounts to –0.35%/°C. The obtained sensors are tested in angle, speed, and phase sensors in the automobile industry. The characteristics of the developed sensors correspond to the analogues of leading world firms.