Effects of ZnO on crystallization, microstructures and properties of BaO–Al2O3–B2O3–SiO2 glass–ceramics

被引:0
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作者
Bo Li
Mingjiang Xu
Bo Tang
机构
[1] University of Electronic Science and Technology of China,State Key Laboratory of Electronic Thin Films and Integrated Devices, School of Microelectronics and Solid
关键词
B2O3; Flexural Strength; Cristobalite; Zn2SiO4; Integrate Circuit;
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中图分类号
学科分类号
摘要
A novel glass–ceramic, BaO–ZnO–Al2O3–B2O3–SiO2, with high coefficient of thermal expansion (CTE) was prepared by the solid-state method. Crystalline phases are quartz (major), cristobalite (minor), and bazirite (minor). Results via whole pattern fitting indicate that crystallinities slightly vary within 33.6–39.3 %, but mass fractions of phases greatly change versus ZnO content. ZnO cannot remarkably promote the crystallization of Ba–Al–B–Si glass. Thermal expansion curves become linear, since the phase transformation from quartz to cristobalite is effectively suppressed by ZnO. An empirical equation of CTE versus temperature and ZnO content was built further. The densification mechanism reveals because Zn2+ with higher field strength increases glass viscosity and hinders ion diffusion, shrinkage rates and densities decrease with ZnO. Flexural strength (σ) and electrical properties thus significantly deteriorate. The sample with 3 wt% ZnO sintered at 950 °C achieves excellent performances: CTE = 12.24 ppm/°C, σ = 153.3 MPa, and ε = 5.7, tanδ = 0.0004, ρ = 4.4 × 1012 Ω cm.
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页码:70 / 76
页数:6
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