共 50 条
- [41] Material selection for optimum design of MEMS pressure sensors MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2020, 26 (09): : 2751 - 2766
- [43] Optical MEMS Pressure Sensors for Geothermal Well Monitoring STRUCTURAL HEALTH MONITORING 2013, VOLS 1 AND 2, 2013, : 2283 - +
- [44] Optimization of Parameters for CMOS MEMS Resonant Pressure Sensors 2015 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP), 2015,
- [45] Evaluation of quality of mechanical components of MEMS pressure sensors MICROPROCESSES AND NANOTECHNOLOGY 2007, DIGEST OF PAPERS, 2007, : 374 - 375
- [46] Material selection for optimum design of MEMS pressure sensors Microsystem Technologies, 2020, 26 : 2751 - 2766
- [49] Nanoscale deformation measurements to improve reliability assessment of sensors and MEMS ADVANCED SENSOR TECHNOLOGIES FOR NONDESTRUCTIVE EVALUATION AND STRUCTURAL HEALTH MONITORING II, 2006, 6179