Manufacturing of Sputtering Composite Targets Containing Phases of Co2FeSi or Co2MnSi Heusler Alloy

被引：0
|
作者：
E. S. Demidov
V. V. Sdobnyakov
G. V. Vazenmiller
Yu. I. Chigirinskii
Yu. A. Dudin
V. P. Lesnikov
V. N. Trushin
M. S. Boldin
O. A. Belkin
A. A. Bobrov
N. V. Sakharov
机构：
[1] Lobachevsky State University of Nizhny Novgorod,
来源：
Technical Physics | 2018年 / 63卷
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摘要：
The paper presents a method for manufacturing mechanically strong sputtering composite targets containing the phase of the Co2FeSi or Co2MnSi Heusler alloy of the stoichiometric composition, which can be used for fabrication of spin electronic devices by high-frequency magnetron deposition and pulsed laser deposition of thin films.
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页码：1002 / 1005
页数：3
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