Carbon microspheres grown by using hydride vapor phase epitaxy

被引:0
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作者
Hunsoo Jeon
Chanmi Lee
Minah Park
Chanbin Lee
Sam Nyung Yi
Min Yang
Hyung Soo Ahn
Suck-Whan Kim
Young Moon Yu
Kee Sam Shin
Jong Seong Bae
Nobuhiko Sawaki
机构
[1] Korea Maritime and Ocean University,Department of Electronic Material Engineering and Compound Semiconductor Fabrication Technology Center
[2] Korea Maritime and Ocean University,Department of Electronic Material Engineering
[3] Andong National University,Department of Physics
[4] Pukyong National University,LED
[5] Changwon National University,MCT R&BD Center
[6] Korea Basic Science Institute,School of Nano & Advanced Materials Engineering
[7] Aichi Institute of Technology,Korea Busan Center
来源
关键词
Carbon microsphere; HVPE; SEM; XPS; TEM;
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摘要
A carbon microsphere of a core-shell type was grown by using a new method of mixed-source hydride vapor phase epitaxy (HVPE). The surface and the cross section of the carbon microsphere grown by using the new method were observed by using scanning electron microscopy (SEM). The characteristics of the carbon microsphere were investigated by using X-ray photoelectron spectroscopy (XPS) and high-resolution transmission electron microscopy (HR-TEM). From these measurements, the diameters of the carbon spheres were about a few hundred micrometers. Furthermore, we showed that carbon microspheres of the core-shell type could be grown successfully by using a mixed-source HVPE method and that they had larger sizes than those grown by using existing methods. This mixed-source HVPE method is proposed as a new method for making carbon microspheres.
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页码:1268 / 1272
页数:4
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