Microfabrication of Silicon-Based Nanoporous Particulates for Medical Applications

被引：0
|
作者：
Michael H. Cohen
Kristie Melnik
Anthony A. Boiarski
Mauro Ferrari
Frank J. Martin
机构：
[1] iMEDD,
[2] Inc.,undefined
[3] The Ohio State University,undefined
来源：
Biomedical Microdevices | 2003年 / 5卷
关键词：
Silicon; Dioxide; Silicon Dioxide Particle; Medical Application; Porous Silicon;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Micron sized particles with nanometer sized pores have been fabricated out of porous silicon and porous silicon dioxide. The porous silicon particles are shaped as hemispherical shells and the porous silicon dioxide particles are asymmetrical squares.
引用
收藏
页码：253 / 259
页数：6
相关论文
共 50 条
  • [11] Applications of Silicon-Based Optoelectronics
    Richard Soref
    MRS Bulletin, 1998, 23 : 20 - 24
  • [12] High-performance nanoporous silicon-based photodetectors
    Thahe, Asad A.
    Bakhtiar, Hazri
    Bidin, Noriah
    Hassan, Z.
    Qaeed, M. A.
    Ramizy, Asmiet
    Talib, Zainal A.
    Ahmed, Naser M.
    Omar, Khalid
    Alciaraghuli, Hasan
    Husham, M.
    Allam, Nageh K.
    OPTIK, 2018, 168 : 424 - 431
  • [13] New approach for batch microfabrication of silicon-based micro fuel cells
    N. Sabaté
    J. P. Esquivel
    J. Santander
    J. G. Hauer
    R. W. Verjulio
    I. Gràcia
    M. Salleras
    C. Calaza
    E. Figueras
    C. Cané
    L. Fonseca
    Microsystem Technologies, 2014, 20 : 341 - 348
  • [14] CHEMICALLY ASSISTED ION-BEAM ETCHING FOR SILICON-BASED MICROFABRICATION
    CHIEH, YS
    KRUSIUS, JP
    CHAPMAN, P
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1994, 141 (06) : 1585 - 1589
  • [15] New approach for batch microfabrication of silicon-based micro fuel cells
    Sabate, N.
    Esquivel, J. P.
    Santander, J.
    Hauer, J. G.
    Verjulio, R. W.
    Gracia, I.
    Salleras, M.
    Calaza, C.
    Figueras, E.
    Cane, C.
    Fonseca, L.
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2014, 20 (02): : 341 - 348
  • [16] Nanoporous silicon-based surface patterns fabricated by UV laser interference techniques for biological applications
    Recio-Sanchez, G.
    Pelaez, R. J.
    Vega, F.
    Martin-Palma, R. J.
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2016, 49 (22)
  • [17] Silicon-based microphotonics for biosensing applications
    Janz, S.
    Densmore, A.
    Xu, D. -X.
    Waldron, P.
    Delage, A.
    Cheben, P.
    Lapointe, J.
    Schmid, J. H.
    OPTICAL WAVEGUIDE SENSING AND IMAGING, 2008, : 167 - 194
  • [18] Applications of Silicon-based Photonic Crystal
    Zhang, Huihui
    Shen, Huajun
    Zhou, Jingtao
    Liu, Xinyu
    PIERS 2009 BEIJING: PROGESS IN ELECTROMAGNETICS RESEARCH SYMPOSIUM, PROCEEDINGS I AND II, 2009, : 1033 - 1035
  • [19] Applications of silicon-based photonic crystals
    Wehrspohn, RB
    2005 2ND IEEE INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS, 2005, : 39 - 41
  • [20] A silicon-based fuel cell micro power system using a microfabrication technique
    Xiao, Zhiyong
    Yan, Guizhen
    Feng, Chunhua
    Chan, Philip C. H.
    Hsing, I-Ming
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2006, 16 (10) : 2014 - 2020
12345