Progress of (Sr, Ba) TiO3 ferroelectric thin film and tunability

被引：5
|
作者：
Fu Xinghua
Shan Lianwei
Ding Biyan
Hou Wenping
Fang Zhou
Fu Zhengyi
机构：
[1] Wuhan University of Technology,The State Key Laboratory of Material Composite and Advanced Technology
[2] Jinan University,Department of Materials Science and Engineering
来源：
Bulletin of Materials Science | 2004年 / 27卷 / 5期
关键词：
(Sr, Ba) TiO; ferroelectric thin films; sol-gel; tunability; dielectric loss;
D O I：
10.1007/BF02708560
中图分类号：
学科分类号：
摘要：
The fabrication method, technology route and structure performances of (Sr, Ba) TiO3 (SBT) ferroelectric thin film have been summarized in this paper. The tunability of dielectric constant, dielectric loss and leakage current are the basic parameters of tunable microwave devices. The thin films of SBT with high properties could be fabricated by means of RF magnetron sputtering and sol- gel processing. The electrical performances of thin film material can be improved largely by dopants. Some problems are put forward to pay attention to this material research process.
引用
收藏
页码：433 / 439
页数：6
相关论文
共 50 条
  • [41] Dielectric tunability properties of sol-gel derived (Ba, Sr, Ca) TiO3 thin films
    School of Material Science and Engineering, Shanghai University, Shanghai 200072, China
    Rengong Jingti Xuebao, 2007, 6 (1343-1346):
  • [42] Relaxor behavior of (Sr, Ba, Bi)TiO3 ferroelectric ceramic
    Chen, Wei
    Yao, Xi
    Wei, Xiaoyong
    SOLID STATE COMMUNICATIONS, 2007, 141 (02) : 84 - 88
  • [43] Progress in the developments of (Ba,Sr)TiO3 (BST) thin films for Gigabit era DRAMs
    Ezhilvalavan, S
    Tseng, TY
    MATERIALS CHEMISTRY AND PHYSICS, 2000, 65 (03) : 227 - 248
  • [44] Thin films of (Ba,Sr)TiO3 by aerosol combustion
    Kussmaul, A
    Greenwald, AC
    Wei, CH
    Morse, TF
    FERROELECTRIC THIN FILMS V, 1996, 433 : 39 - 44
  • [45] The properties of oriented (Ba, Sr)TiO3 thin Films
    Ding, W
    Meng, ZY
    FOURTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS, 2000, 4086 : 675 - 678
  • [46] Dielectric relaxation of (Ba, Sr)TiO3 thin films
    Horikawa, Tsuyoshi, 1600, JJAP, Minato-ku, Japan (34):
  • [47] Microstructure and hydrogen gas sensitivity of amorphous (Ba, Sr)TiO3 thin film sensors
    Zhu, W
    Tan, OK
    Yan, Q
    Oh, JT
    TECHNICAL DIGEST OF THE SEVENTH INTERNATIONAL MEETING ON CHEMICAL SENSORS, 1998, : 359 - 361
  • [48] Low temperature hydrogen induced degradation of (Ba,Sr)TiO3 thin film capacitors
    Baniecki, JD
    Parks, C
    Laibowitz, RB
    Shaw, TM
    Lian, J
    Costrini, G
    FERROELECTRIC THIN FILMS VIII, 2000, 596 : 25 - 30
  • [49] (Ba,Sr)TiO3 thin film capacitors with Ru electrodes for application to ULSI processes
    Iizuka, T.
    Arita, K.
    Yamamoto, I.
    Yamamichi, S.
    NEC Research and Development, 2001, 42 (01): : 64 - 69
  • [50] Electric-field-induced monoclinic phase in (Ba,Sr)TiO3 thin film
    Anokhin, A. S.
    Yuzyuk, Yu. I.
    Golovko, Yu. I.
    Mukhortov, V. M.
    El Marssi, M.
    JOURNAL OF APPLIED PHYSICS, 2011, 109 (07)
12345