Investigations of the spatial distribution of the energy characteristics of plasma radiators for a system of assurance of uniformity of measurements in nanolithography

被引：0
|
作者：
R. V. Minaev
机构：
[1] All-Russia Research Institute of Optophysical Measurements,
来源：
Measurement Techniques | 2007年 / 50卷
关键词：
ultraviolet and synchrotron radiation; radiance; nanolithography; spectral range; radiant intensity;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A comparator that incorporates an imaging system and a position-sensitive detector is developed. The comparator supports the formation of spectro-zonal images with calibration in units of radiance and radiant intensity through the use of synchrotron radiation. A comparator is needed to obtain information about the distribution of the radiance of plasma radiators used in nanolithography in the area of extremal vacuum ultraviolet radiation.
引用
收藏
页码：519 / 523
页数：4
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