Raman spectroscopy of self-assembled Ge islands on Si

被引:0
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作者
T.R. Yang
M.M. Dvoynenko
Z.C. Feng
H.H. Cheng
机构
[1] Department of Physics National Taiwan Normal University 117 Taipei,
[2] Taiwan,undefined
[3] School of Electrical & Computer Engineering,undefined
[4] Georgia Institute of Technology,undefined
[5] Atlanta,undefined
[6] GA 30332-0250,undefined
[7] USA,undefined
[8] Center of Condensed Matter,undefined
[9] National Taiwan University,undefined
[10] 106 Taipei,undefined
[11] Taiwan,undefined
关键词
PACS. 78.30.Am Elemental semiconductors and insulators – 78.66.Db Elemental semiconductors and insulators – 63.22.+m Phonons or vibrational states in low-dimensional structures and nanoscale materials;
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摘要
We present a Raman scattering study for self-organized Ge dots on Si substrate. By means of difference Raman spectroscopy technique, we have separated the Raman signals from the Ge islands and Si substrate. The wetting layer thickness and strain were estimated from the line width and peak frequency. The estimated wetting layer thickness values are comparative with the Ge dot height obtained from microscopy measurements. The strain is decreased with an increase of the thickness.
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页码:41 / 45
页数:4
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