Resonance frequency tracking and measuring system for micro-electromechanical cantilever array sensors

This paper presents a resonance frequency tracking and measuring system for MEMS cantilever array sensors. A cell constitutes five micro-cantilevers driven by a piezoactuator, and the resonance signal of each micro-cantilever is read out by a Wheatstone bridge. An analog resonance circuit is developed to track all resonance frequencies. Meanwhile, a digital circuit base on Microcontroller Unit is utilized to measure the resonance frequency and processes the data. The developed system has a frequency capture range from 190 to 310 kHz. The measurement accuracy of the frequency measuring circuit is 0.3 Hz. Moreover, the frequency stability of micro-cantilever in this system can achieve 4 Hz. This system provides a promising approach to apply micro-cantilever array sensors in a portable instrument.