Effect of post-deposition annealing on microstructural and optical properties of barium strontium titanate thin films deposited by r.f. magnetron sputtering

The effect of post-deposition annealing on the structural and optical properties of barium strontium titanate, Ba0.8Sr0.2TiO3 film has been investigated. The films have been deposited on oxidized p-silicon substrates by r.f. magnetron sputtering followed by annealing in O2 atmosphere at different temperatures. In situ deposition has also been carried out at 550 °C for comparison. The nature of the variation of refractive index and extinction coefficient with annealing temperature and wavelength has been studied. Absorption band edges shift towards lower photon energy values as the temperature is increased causing a reduction in the optical band gap energy. Infrared absorption bands show a cubic symmetry at lower frequency and are found to be broadened and even split at higher frequency.