Ion-induced sputtering of a metal in the form of large clusters

被引：0
|
作者：
V. I. Matveev
S. F. Belykh
I. V. Berevkin
机构：
[1] Uzbekistan Academy of Sciences,Department of Thermal Physics
[2] Academy of Sciences of the Republic of Uzbekistan,Institute of Electronics
来源：
Technical Physics | 1999年 / 44卷
关键词：
Experimental Data; Argon; Large Cluster; Physical Assumption; Relative Cluster;
D O I：
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中图分类号：
学科分类号：
摘要：
A model is proposed for the ion-induced sputtering of a metal in the form of large clusters with a number of atoms N⩾5. The model is based on simple physical assumptions and is consistent with experiment. As an example, calculations are made of the relative cluster yield as a function of the number of atoms in the cluster as a result of the bombardment of various metals by singly charged 5 keV argon ions. A comparison is made with experimental data.
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页码：323 / 327
页数：4
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