MEMS-Based Gas Sensor Using PdO-Decorated TiO2 Thin Film for Highly Sensitive and Selective H2 Detection with Low Power Consumption

被引：0
|
作者：
Seungmin Kwak
Young-Seok Shim
Yong Kyoung Yoo
Jin-Hyung Lee
Inho Kim
Jinseok Kim
Kyu Hyoung Lee
Jeong Hoon Lee
机构：
[1] Kwangwoon University,Department of Electrical Engineering
[2] Korea Institute of Science and Technology (KIST),R&D Center
[3] Maccon IT Inc.,Department of Chemical Engineering
[4] Ajou University,School of Electrical and Electronic Engineering
[5] Nanyang Technological University,Department of Materials Science and Engineering
[6] Yonsei University,undefined
来源：
Electronic Materials Letters | 2018年 / 14卷
关键词：
MEMS; Gas sensor; Hydrogen; Thin film; PdO; Micro-heater;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：305 / 313
页数：8
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