Full-Optical Two-Channel Adaptive System for Detecting Microcantilever Vibrations

被引:0
|
作者
Roman Romashko
Timofey Efimov
Yuri Kulchin
机构
[1] Russian Academy of Sciences,Laboratory of Precision Optical Measurement Techniques Institute of Automation and Control Processes
[2] Far-Eastern Federal University,School of Natural Sciences
来源
Journal of Russian Laser Research | 2016年 / 37卷
关键词
adaptive interferometer; photorefractive crystal; vibration detection; cantilever; multichannel;
D O I
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中图分类号
学科分类号
摘要
We demonstrate a full-optical two-channel system for measuring mechanical vibrations of microoscillators, which is based on adaptive holographic interferometer using multiwave mixing in a photorefractive crystal. The orthogonal geometry of dynamic hologram recording makes possible independent operation of the measurement channels. The absolute detection limit of the system to cantilever vibrations in a channel amounted to 2.6·10−6 nm·W1/2·Hz−1/2. We tested the system in simultaneous detection of vibrations of two cantilevers with dimensions 215×40×15 μm.
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页码:102 / 106
页数:4
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