Silicon Nitride Thin Windows for Biomedical Microdevices

被引：0

作者：

Dino R. Ciarlo

机构：

[1] Lawrence Livermore National Laboratory,

来源：

Biomedical Microdevices | 2002年 / 4卷

关键词：

silicon nitride; thin windows; microfabrication;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

We report on several years of experience with the design, fabrication and use of silicon nitride thin windows. The thickness used has ranged from 20 nm to several micrometers. The window area has ranged from an edge dimension of a few micrometers to a few centimeters. Using IC technology, these windows can be mass-produced in an efficient manner. Their tensile stress can be adjusted to range from 100 MPa to 1 GPa, and they can be patterned to contain holes and slots.

引用

页码：63 / 68

页数：5

共 50 条

[1] Silicon nitride thin windows for biomedical microdevices
Ciarlo, DR
BIOMEDICAL MICRODEVICES, 2002, 4 (01) : 63 - 68
[2] Characterization of vapor deposited thin silane films on silicon substrates for biomedical microdevices
Popat, KC
Robert, RW
Desai, TA
SURFACE & COATINGS TECHNOLOGY, 2002, 154 (2-3): : 253 - 261
[3] Biocompatible silicon wafer bonding for biomedical microdevices
Hansford, D
Desai, T
Tu, J
Ferrari, M
MICRO- AND NANOFABRICATED STRUCTURES AND DEVICES FOR BIOMEDICAL ENVIRONMENTAL APPLICATIONS, 1998, 3258 : 164 - 168
[4] Ultra-Thin Silicon Nitride X-Ray Windows
Torma, Pekka T.
Sipila, Heikki J.
Mattila, Marco
Kostamo, Pasi
Kostamo, Jari
Kostamo, Esa
Lipsanen, Harri
Nelms, Nick
Shortt, Brian
Bavdaz, Marcos
Laubis, Christian
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2013, 60 (02) : 1311 - 1314
[5] SILICON NITRIDE RAPID DECOMPOSITION FOR FORMATION OF NANOSIZED POWDERS FOR SHAPING MICRODEVICES
Kata, Dariusz
Lis, Jerzy
ADVANCED PROCESSING AND MANUFACTURING TECHNOLOGIES FOR STRUCTURAL AND MULTIFUNCTIONAL MATERIALS II, 2009, 29 (09): : 139 - 146
[6] Silicon Nitride as a Biomedical Material: An Overview
Du, Xiaoyu
Lee, Seunghun S.
Blugan, Gurdial
Ferguson, Stephen J.
INTERNATIONAL JOURNAL OF MOLECULAR SCIENCES, 2022, 23 (12)
[7] Performance and Properties of Ultra-Thin Silicon Nitride X-ray Windows
Torma, Pekka T.
Kostamo, Jari
Sipila, Heikki
Mattila, Marco
Kostamo, Pasi
Kostamo, Esa
Lipsanen, Harri
Laubis, Christian
Scholze, Frank
Nelms, Nick
Shortt, Brian
Bavdaz, Marcos
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2014, 61 (01) : 695 - 699
[8] Amorphous Silicon Carbide as a Non-Biofouling Structural Material for Biomedical Microdevices
Zorman, C.
Eldridge, A.
Du, J.
Johnston, M.
Dubnisheva, A.
Manley, S.
Fissell, W.
Fleischman, A.
Roy, S.
SILICON CARBIDE AND RELATED MATERIALS 2011, PTS 1 AND 2, 2012, 717-720 : 537 - +
[9] Biomedical microdevices for neural interfaces
Meyer, JU
Schüttler, M
Thielecke, H
Stieglitz, T
1ST ANNUAL INTERNATIONAL IEEE-EMBS SPECIAL TOPIC CONFERENCE ON MICROTECHNOLOGIES IN MEDICINE & BIOLOGY, PROCEEDINGS, 2000, : 447 - 453
[10] Biomedical microdevices at the Cleveland clinic
Roy, Shuvo
Fleischman, Aaron J.
ADVANCED MATERIALS & PROCESSES, 2006, 164 (10): : 44 - 45

← 1 2 3 4 5 →