Review of Thin Film Transistor Gas Sensors: Comparison with Resistive and Capacitive Sensors

被引：0
|
作者：
A. K. Singh
N. K. Chowdhury
Somnath C. Roy
B. Bhowmik
机构：
[1] National Institute of Technology,Thin Film Devices Laboratory, Department of Electronics and Communication Engineering
[2] Jamshedpur,Department of Physics
[3] Indian Institute of Technology Madras,undefined
来源：
Journal of Electronic Materials | 2022年 / 51卷
关键词：
Thin film field effect transistor (TFT); gas sensor; sensing mechanism; resistive sensor; capacitive sensor;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：1974 / 2003
页数：29
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