3D simulation of electrodynamics of a microwave low pressure discharge

被引：0
|
作者：
Yu. A. Lebedev
A. V. Tatarinov
I. L. Epshtein
机构：
[1] Russian Academy of Sciences (TIPS RAS),Topchiev Institute of Petrochemical Synthesis
来源：
High Temperature | 2011年 / 49卷
关键词：
Microwave Field; Discharge Chamber; Observation Window; Electron Energy Distribution Function; Center Electrode;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The structure of microwave fields in a discharge chamber used for obtaining electrode microwave discharge is investigated. It is shown that 3D-simulation allows quantitatively determining the optimumal structural parts of the discharge chamber for discharge generation. The represented results of self-consistent simulation of the discharge in nitrogen and hydrogen at a pressure of 1 torr are qualitatively consistent with experimental results.
引用
收藏
页码：775 / 787
页数：12
相关论文
共 50 条
  • [41] 3D WEATHER SIMULATION ON 3D VIRTUAL EARTH
    FanHong, FengHao
    2012 IEEE INTERNATIONAL GEOSCIENCE AND REMOTE SENSING SYMPOSIUM (IGARSS), 2012, : 543 - 545
  • [42] Simulation of shaping discharge in pulsed gas-discharge switches of low pressure
    Yudaev, YA
    IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA, 2000, 64 (07): : 1307 - 1316
  • [43] Study of transport phenomena by 3D modeling of a microwave post-discharge nitriding reactor
    Belmonte, T
    Bockel, S
    Michel, H
    Ablitzer, D
    SURFACE & COATINGS TECHNOLOGY, 1999, 112 (1-3): : 5 - 9
  • [44] Study of transport phenomena by 3D modeling of a microwave post-discharge nitriding reactor
    Belmonte, T.
    Bockel, S.
    Michel, H.
    Ablitzer, D.
    Surface and Coatings Technology, 1999, 112 (01): : 5 - 9
  • [45] 3D Unconditionally Stable FDTD Modeling of Micromagnetics and Electrodynamics
    Yao, Zhi
    Wang, Yuanxun Ethan
    2017 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM (IMS), 2017, : 12 - 15
  • [46] 3D imaging reveals electrodynamics of polar cap aurora
    Dahlgren, Hanna
    Perry, Gareth
    St Maurice, Jean-Pierre
    Sundberg, Torbjorn
    Hosokawa, Keisuke
    Semeter, Joshua L.
    Nicolls, Michael J.
    Shiokawa, Kazuo
    ASTRONOMY & GEOPHYSICS, 2014, 55 (05)
  • [47] Low Cost 3D Multilevel Interconnect Integration for RF and Microwave Applications
    Ghannam, Ayad
    Bourrier, David
    Ourak, Lamine
    Viallon, Christophe
    Parra, Thierry
    2012 IEEE 62ND ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC), 2012, : 1351 - 1355
  • [48] Engineering use of hydrodynamic 3D simulation to assess spillway discharge capacity Discussion
    Laugier, Frederic
    HOUILLE BLANCHE-REVUE INTERNATIONALE DE L EAU, 2010, (02): : 49 - 50
  • [49] 3D PROCESS SIMULATION
    WIGHT, JD
    COMPUTER GRAPHICS WORLD, 1987, 10 (07) : 84 - &
  • [50] Nanorobotics system simulation in 3D workspaces with low Reynolds number
    Cavalcanti, Adriano
    Hogg, Tad
    Shirinzadeh, Bijan
    2006 IEEE INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE, 2006, : 449 - +
12345