Photonic-dispersion neural networks for inverse scattering problems

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作者
Tongyu Li
Ang Chen
Lingjie Fan
Minjia Zheng
Jiajun Wang
Guopeng Lu
Maoxiong Zhao
Xinbin Cheng
Wei Li
Xiaohan Liu
Haiwei Yin
Lei Shi
Jian Zi
机构
[1] Fudan University,State Key Laboratory of Surface Physics, Key Laboratory of Micro
[2] Shanghai Engineering Research Center of Optical Metrology for Nano-fabrication (SERCOM), and Nano
[3] Tongji University,Photonics Structures (Ministry of Education) and Department of Physics
[4] National Institute of Metrology,Institute of Precision Optical Engineering, School of Physics Science and Engineering
[5] Nanjing University,Collaborative Innovation Center of Advanced Microstructures
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摘要
Inferring the properties of a scattering objective by analyzing the optical far-field responses within the framework of inverse problems is of great practical significance. However, it still faces major challenges when the parameter range is growing and involves inevitable experimental noises. Here, we propose a solving strategy containing robust neural-networks-based algorithms and informative photonic dispersions to overcome such challenges for a sort of inverse scattering problem—reconstructing grating profiles. Using two typical neural networks, forward-mapping type and inverse-mapping type, we reconstruct grating profiles whose geometric features span hundreds of nanometers with nanometric sensitivity and several seconds of time consumption. A forward-mapping neural network with a parameters-to-point architecture especially stands out in generating analytical photonic dispersions accurately, featured by sharp Fano-shaped spectra. Meanwhile, to implement the strategy experimentally, a Fourier-optics-based angle-resolved imaging spectroscopy with an all-fixed light path is developed to measure the dispersions by a single shot, acquiring adequate information. Our forward-mapping algorithm can enable real-time comparisons between robust predictions and experimental data with actual noises, showing an excellent linear correlation (R2 > 0.982) with the measurements of atomic force microscopy. Our work provides a new strategy for reconstructing grating profiles in inverse scattering problems.
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