Ultrafast growth of wafer-scale fold-free bilayer graphene

被引:0
|
作者
Jilin Tang
Yuechen Wang
Yuwei Ma
Xiaoyin Gao
Xin Gao
Ning Li
Yani Wang
Shishu Zhang
Liming Zheng
Bing Deng
Rui Yan
Yisen Cao
Ronghua Zhang
Lianming Tong
Jin Zhang
Peng Gao
Zhongfan Liu
Xiaoding Wei
Hongtao Liu
Hailin Peng
机构
[1] Peking University,Center for Nanochemistry, Beijing Science and Engineering Centre for Nanocarbons, Beijing National Laboratory for Molecular Sciences, College of Chemistry and Molecular Engineering
[2] Peking University,Academy for Advanced Interdisciplinary Studies
[3] Beijing Graphene Institute,State Key Laboratory for Turbulence and Complex System, Department of Mechanics and Engineering Science, College of Engineering, Beijing Innovation Center for Engineering Science and Advanced Technology
[4] Peking University,Electron Microscopy Laboratory, School of Physics, International Center for Quantum Materials
[5] Peking University,undefined
来源
Nano Research | 2023年 / 16卷
关键词
bilayer graphene; graphene wrinkles; ultrafast growth; optical microscopy; single crystal wafer;
D O I
暂无
中图分类号
学科分类号
摘要
Bilayer graphene provides a versatile platform for exploring a variety of intriguing phenomena and shows much promise for applications in electronics, optoelectronics, etc. Controlled growth of large-area bilayer graphene is therefore highly desired yet still suffers from a slow growth rate and poor layer uniformity. Meanwhile, graphene wrinkles, including folds and ripples, form during cooling due to the thermal contraction mismatch between graphene and the metal substrates, and have been far from suppressed or eliminated, especially in bilayer graphene, which would greatly degrade the extraordinary properties of graphene. Here we report the ultrafast growth of wafer-scale fold-free bilayer graphene by chemical vapor deposition. Through well-tuning the alloy thickness and strain regulation of the single-crystal CuNi(111)/sapphire, the full coverage of a 2-inch fold-free bilayer graphene wafer via mainly isothermal segregation has been achieved as fast as 30 s. The tensile-strained CuNi(111) film reduces the thermal contraction mismatch and suppresses the formation of graphene folds during cooling, which is directly observed through in situ optical microscopy. The ultraflat bilayer graphene exhibits wafer-scale uniformity in electrical performance and enhanced mechanical property comparable to the exfoliated ones. Our results offer a promising route for large-scale production of bilayer graphene and enable its various applications.
引用
收藏
页码:10684 / 10689
页数:5
相关论文
共 50 条
  • [21] HIGH-PERFORMANCE WAFER-SCALE TRANSFER-FREE GRAPHENE MICROPHONES
    Pezone, Roberto
    Baglioni, Gabriele
    Sarro, Pasqualina M.
    Steeneken, Peter G.
    Vollebregt, Sten
    2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS, 2023, : 131 - 134
  • [22] Wafer-Scale Statistical Analysis of Graphene FETs-Part I: Wafer-Scale Fabrication and Yield Analysis
    Smith, Anderson D.
    Wagner, Stefan
    Kataria, Satender
    Malm, B. Gunnar
    Lemme, Max C.
    Ostling, Mikael
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2017, 64 (09) : 3919 - 3926
  • [23] Single-crystal, large-area, fold-free monolayer graphene
    Wang, Meihui
    Huang, Ming
    Luo, Da
    Li, Yunqing
    Choe, Myeonggi
    Seong, Won Kyung
    Kim, Minhyeok
    Jin, Sunghwan
    Wang, Mengran
    Chatterjee, Shahana
    Kwon, Youngwoo
    Lee, Zonghoon
    Ruoff, Rodney S.
    NATURE, 2021, 596 (7873) : 519 - +
  • [24] Single-crystal, large-area, fold-free monolayer graphene
    Meihui Wang
    Ming Huang
    Da Luo
    Yunqing Li
    Myeonggi Choe
    Won Kyung Seong
    Minhyeok Kim
    Sunghwan Jin
    Mengran Wang
    Shahana Chatterjee
    Youngwoo Kwon
    Zonghoon Lee
    Rodney S. Ruoff
    Nature, 2021, 596 : 519 - 524
  • [25] Transfer-Free, Wafer-Scale Fabrication of Graphene-Based Nanoelectromechanical Resonators
    Cullinan, Michael A.
    Gorman, Jason J.
    2013 MICROSYSTEMS FOR MEASUREMENT AND INSTRUMENTATION (MAMNA), 2013, : 3 - 6
  • [26] Development toward Wafer-Scale Graphene RF Electronics
    Moon, J. S.
    Curtis, D.
    Hu, M.
    Wong, D.
    Campbell, P. M.
    Jernigan, G.
    Tedesco, J.
    VanMil, B.
    Myers-Ward, R.
    Eddy, C., Jr.
    Gaskill, D. K.
    Robinson, J.
    Fanton, M.
    Asbeck, P.
    GRAPHENE AND EMERGING MATERIALS FOR POST-CMOS APPLICATIONS, 2009, 19 (05): : 35 - 40
  • [27] Development toward Wafer-Scale Graphene RF Electronics
    Moon, J. S.
    Curtis, D.
    Hu, M.
    Wong, D.
    Campbell, P. M.
    Jernigan, G.
    Tedesco, J.
    VanMil, B.
    Myers-Ward, R.
    Eddy, C., Jr.
    Gaskill, D. K.
    Robinson, J.
    Fanton, M.
    Asbeck, P.
    2010 TOPICAL MEETING ON SILICON MONOLITHIC INTEGRATED CIRCUITS IN RF SYSTEMS, 2010, : 1 - +
  • [28] Wafer-scale epitaxial graphene on SiC for sensing applications
    Karlsson, Mikael
    Wang, Qin
    Zhao, Yichen
    Zhao, Wei
    Toprak, Muhammet S.
    Iakimov, Tihomir
    Ali, Amer
    Yakimova, Rositza
    Syvajarvi, Mikael
    Ivanov, Ivan G.
    MICRO+NANO MATERIALS, DEVICES, AND SYSTEMS, 2015, 9668
  • [29] Effect of Substrate Roughness and Feedstock Concentration on Growth of Wafer-Scale Graphene at Atmospheric Pressure
    Luo, Zhengtang
    Lu, Ye
    Singer, Daniel W.
    Berck, Matthew E.
    Somers, Luke A.
    Goldsmith, Brett R.
    Johnson, A. T. Charlie
    CHEMISTRY OF MATERIALS, 2011, 23 (06) : 1441 - 1447
  • [30] Direct Wafer-Scale CVD Graphene Growth under Platinum Thin-Films
    Hagendoorn, Yelena
    Pandraud, Gregory
    Vollebregt, Sten
    Morana, Bruno
    Sarro, Pasqualina M.
    Steeneken, Peter G.
    MATERIALS, 2022, 15 (10)