High aspect ratio meso-scale parts enabled by wire micro-EDM

Micro-electro discharge machining (EDM) is a subtractive meso-scale machining process. The Agie Excellence 2F wire micro EDM is capable of machining with a 25 micron diameter wire electrode and positioning the work piece to within ±1.5 microns. The over-burn gap can be controlled to within 3 microns to obtain a minimum feature radius of about 16 microns while achieving submicron surface finish and an imperceptible recast layer. For example, meso-scale gears that require vertical sidewalls and contour tolerances to within 3 microns can be wire EDMed into a variety of conductive materials. Material instabilities can affect the dimensional precision of machined meso-scale parts by material relaxation during the machining process. A study is done to investigate the machining performance of the wire micro EDM process by machining a high aspect ratio meso-scale part into a variety of metals (e.g. 304L stainless steel, Nitronic 60 Austentic Stainless, Beryllium Copper, and Titanium). Machining performance parameters such as, profile tolerance, perpendicularity, and repeatability are compared for the different materials. Pertinent inspection methods desirable for meso-scale quality assurance tasks are also evaluated. Sandia National Laboratories is developing meso-scale electro-mechanical components and has an interest in the assembly implications of piece parts fabricated by various meso-scale manufacturing processes. Although the wire EDM process is typically used to fabricate 21/2 dimensional features, these features can be machined into a 3 dimensional part having other features such as hubs and chamfers to facilitate assembly.