[5] Research Group on Laser Physics of the Hungarian Academy of Scienses,undefined
[6] 6701 Szeged,undefined
[7] P.O. Box 406,undefined
[8] Hungary,undefined
来源:
Applied Physics A
|
1999年
/
69卷
关键词:
PACS: 43.25.Cb; 61.80;
D O I:
暂无
中图分类号:
学科分类号:
摘要:
Highly oriented pyrolytic graphite (HOPG) was ablated by a 193-nm ArF excimer laser in air. The fluence was varied in the range 1–25 J/cm2. Every laser shot hit a pristine graphite surface. The emerging shock wave was recorded by a nanosecond-resolution photographic arrangement. The velocity of the shock wave as a function of time and laser fluence was measured. The amount of energy that generates the shock wave was determined and found to be about 5–7% of the incident laser energy. The shock wave is already present 10–15 ns after the maximum of the incident laser pulse. These facts imply that, even if high-energy (10–100 eV) ions, atoms, or clusters leave the surface, a layer several 10 nm thick has to be removed during this short period. The temperature of the shock front is ∼2500–4000 K, as derived from the measured velocities. Measuring the ablation depth by atomic force microscopy as a function of fluence revealed that the single-shot ablation threshold is 1.4±0.2 J/cm2, and the effective absorption coefficient is ∼1.5×105 cm-1.
机构:
Univ of California, Livermore, CA,, USA, Univ of California, Livermore, CA, USAUniv of California, Livermore, CA,, USA, Univ of California, Livermore, CA, USA