Estimation of the electron density and radiative energy losses in a calcium plasma source based on an electron cyclotron resonance discharge

被引:0
|
作者
E. P. Potanin
A. L. Ustinov
机构
[1] National Research Centre Kurchatov Institute,
[2] National Research Nuclear University Moscow Engineering Physics Institute,undefined
来源
Plasma Physics Reports | 2013年 / 39卷
关键词
Plasma Physic Report; Transverse Energy; Electron Cyclotron Resonance; Discharge Zone; Inhomogeneous Magnetic Field;
D O I
暂无
中图分类号
学科分类号
摘要
The parameters of a calcium plasma source based on an electron cyclotron resonance (ECR) discharge were calculated. The analysis was performed as applied to an ion cyclotron resonance system designed for separation of calcium isotopes. The plasma electrons in the source were heated by gyrotron microwave radiation in the zone of the inhomogeneous magnetic field. It was assumed that, in such a combined trap, the energy of the extraordinary microwave propagating from the high-field side was initially transferred to a small group of resonance electrons. As a result, two electron components with different transverse temperatures—the hot resonance component and the cold nonresonance component—were created in the plasma. The longitudinal temperatures of both components were assumed to be equal. The entire discharge space was divided into a narrow ECR zone, where resonance electrons acquired transverse energy, and the region of the discharge itself, where the gas was ionized. The transverse energy of resonance electrons was calculated by solving the equations for electron motion in an inhomogeneous magnetic field. Using the law of energy conservation and the balance condition for the number of hot electrons entering the discharge zone and cooled due to ionization and elastic collisions, the density of hot electrons was estimated and the dependence of the longitudinal temperature Te∥ of the main (cold) electron component on the energy fraction β lost for radiation was obtained.
引用
收藏
页码:510 / 514
页数:4
相关论文
共 50 条
  • [41] Development and studies on a compact electron cyclotron resonance plasma source
    Ganguli, A.
    Tarey, R. D.
    Arora, N.
    Narayanan, R.
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2016, 25 (02):
  • [42] Characterization of a permanent magnet electron cyclotron resonance plasma source
    Mantei, T.O.
    Ohale, S.
    Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, 1991, 9 (01): : 26 - 28
  • [43] Electron cyclotron resonance plasma ion source for material depositions
    Delaunay, M
    Touchais, E
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1998, 69 (06): : 2320 - 2324
  • [44] Electron cyclotron resonance plasma source in a flaring magnetic field
    Caron, X.
    Meyer, R. L.
    Meis, C.
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 1994, 3 (02):
  • [45] Long electron cyclotron resonance plasma source for reactive sputtering
    Yasui, Toshiaki
    Nakase, Kiyotaka
    Tahara, Hirokazu
    Yoshikawa, Takao
    1996, JJAP, Minato-ku, Japan (35):
  • [46] Electron cyclotron resonance plasma source in a flaring magnetic field
    Caron, X.
    Meyer, R.L.
    Meis, C.
    Plasma Sources Science and Technology, 1994, 3 (02)
  • [47] Plasma expansion from a dielectric electron cyclotron resonance source
    Aanesland, A
    Charles, C
    PHYSICA SCRIPTA, 2006, T122 : 19 - 24
  • [48] Characterization of electron cyclotron resonance source plasma for etching and deposition
    Angra, SK
    Kumar, P
    Banerjie, PC
    Bajpai, RP
    THIN SOLID FILMS, 1997, 304 (1-2) : 294 - 298
  • [49] Numerical study on uniformity of electron cyclotron resonance plasma density
    Gao Bi-Rong
    Liu Yue
    ACTA PHYSICA SINICA, 2011, 60 (04)
  • [50] TIME DEPENDENCE OF ANISOTROPY OF ELECTRON ENERGY DISTRIBUTION IN AN ELECTRON CYCLOTRON RESONANCE PLASMA
    CONNOR, KA
    CASPER, TA
    SHOHET, JL
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1969, 14 (11): : 1019 - &