Influence of laser parameters and material properties on micro drilling with femtosecond laser pulses

被引：0
|
作者：
X. Zhu
A.Yu. Naumov
D.M. Villeneuve
P.B. Corkum
机构：
[1] National Research Council,
[2] 100 Sussex Drive,undefined
[3] Ottawa,undefined
[4] Ontario,undefined
[5] K1A 0R6,undefined
[6] Canada (Fax: +613-991/3437,undefined
[7] E-mail: xiaonong.zhu@nrc.ca),undefined
来源：
Applied Physics A | 1999年 / 69卷
关键词：
PACS: 79.20DS;
D O I：
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中图分类号：
学科分类号：
摘要：
We report experimental results of drilling micro holes in Al, Mo, Ti, Cu, Ag, Au, and brass thin metal foils in air using 60-femtosecond Ti:sapphire laser pulses. The influence of laser parameters and material properties on drilling processes at the sub-10-micron scale has been examined. Comparison of hole drilling using 60-fs pulses with that using 50-ps and 10-ns pulses at an energy fluence of ∼15 J/cm2 indicates that a significant amount of melting is present in both ps and ns regimes, whereas with fs pulses, fewer and much smaller droplets from the molten phase are observed.
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页码：S367 / S371
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