Kinetics of an RF low-pressure discharge with a condensed phase

被引：0
|
作者：
V. I. Strunin
A. A. Lyakhov
G. Zh. Khudaibergenov
V. V. Shkurkin
机构：
[1] Omsk State University,
来源：
Technical Physics | 2004年 / 49卷
关键词：
Dust; Distribution Function; Electron Energy; Energy Distribution; Dust Particle;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The electron energy distribution function in an RF low-pressure plasma is found in the presence of dust particles. The effect of microscopic objects on the electroneutrality of the plasma and the electron energy distribution is estimated.
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收藏
页码：502 / 504
页数：2
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