A high-speed photoconductive UV detector based on an Mg0.4Zn0.6O thin film

被引：27

作者：

Jiang, D. Y. ^{[1
]}

Zhang, J. Y. ^{[1
]}

Liu, K. W. ^{[1
]}

Zhao, Y. M. ^{[1
]}

Cong, C. X. ^{[1
]}

Lu, Y. M. ^{[1
]}

Yao, B. ^{[1
]}

Zhang, Z. Z. ^{[1
]}

Shen, D. Z. ^{[1
]}

机构：

[1] Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, Key Lab Excited State Proc, Changchun 130033, Peoples R China

来源：

SEMICONDUCTOR SCIENCE AND TECHNOLOGY | 2007年 / 22卷 / 07期

关键词：

D O I：

10.1088/0268-1242/22/7/001

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A high quality MgxZn1-xO thin film with up to similar to 40 at% Mg incorporation was grown on a quartz substrate by the rf magnetron sputtering technique. The photoconductive type of Mg0.4Zn0.6O metal - semiconductor - metal ultraviolet detector was prepared. The ratio of the ultraviolet to visible was more than four orders of magnitude; the 10% - 90% rise and fall times were 16 ns and 250 ns, respectively. Furthermore, the dark current was below 40 nA under 3 V bias and the gain was observed which caused the high responsivity (similar to 1.3 A W-1) at 320 nm, and the corresponding detectivity D* was 1.37 x 10(11) cm Hz(1/2) W-1. A high-speed response was attributed to the high quality of the Mg0.4Zn0.6O thin film, which was found to dramatically enhance the UV detection properties of the device. The effect of the gain on the fall time and responsivity was analysed in the present work.

引用

页码：687 / 690

页数：4

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