A MULTIPLE-BEAM TUNING-FORK GYROSCOPE WITH HIGH QUALITY FACTORS

被引：0

作者：

Wang, Ren ^{[1
]}

Durgam, Shiva Krishna ^{[1
]}

Hao, Zhili ^{[1
]}

Vahala, Linda

机构：

[1] Old Dominion Univ, Dept Mech Engn, Norfolk, VA 23529 USA

来源：

IMECE 2009: PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, VOL 12, PTS A AND B | 2010年

关键词：

D O I：

暂无

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

This paper reports on the design, fabrication, and testing of a multiple-beam tuning-fork gyroscope featuring high Quality factors (Q). A multiple-beam tuning-fork structure is designed to achieve high Qs in its drive mode and sense mode. The gyroscope is fabricated on a 30 mu m-thick SOI wafer using a one-mask fabrication process. The measured Qs of the fabricated gyroscope are 162,060 in the drive-mode and 85,168 in the sense mode at an operation frequency of 16.8kHz. Under a frequency split of 6Hz, the prototype device demonstrates a rate sensitivity of 0.02mV/degrees/sec.

引用

页码：415 / 416

页数：2

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