Determination of an X-ray microprobe size

被引：0

作者：

Avrutin, VS ^{[1
]}

Gartman, YM ^{[1
]}

Zaitsev, SI ^{[1
]}

Zuev, AP ^{[1
]}

Izumskaya, NF ^{[1
]}

Ushakov, NG ^{[1
]}

Chukalina, MV ^{[1
]}

机构：

[1] Russian Acad Sci, Inst Microelect & Highly Pure Mat Technol Problem, Chernogolovka 142432, Russia

来源：

IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA | 1997年 / 61卷 / 10期

关键词：

D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：1999 / 2002

页数：4

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