Electro-optic response in epitaxially stabilized orthorhombic mm2 BaTiO3

BaTiO3 (BTO) is an emergent material in the field of silicon-integrated photonics, as its thin films have been demonstrated to have a very large electro-optic (Pockels) coefficient that can be used for optical modulators. However, BTO grown directly on SrTiO3 (STO)-buffered Si (STO is required for epitaxial growth) initially grows with a polarization direction not suitable for the geometries currently used in photonic devices. Here, we grow BTO on a BaSnO3-buffered STO substrate to form orthorhombic mm2 BTO, which has in-plane polarization orientation needed for photonic devices. Extensive crystalline characterization is done to confirm the high quality of the films, along with electro-optic measurements. Theoretical simulations coupled with the experimental results provide a foundational understanding of the properties of strain-stabilized orthorhombic BTO. Large electro-optic coefficients of 121 pm/V are observed in films as thin as 40 nm.