Micro-optical spatial and spectral elements

被引:2
|
作者
Srinivasan, Pradeep [1 ]
Yilmaz, Yigit O. [2 ]
Rumpf, Raymond C. [3 ]
Johnson, Eric G. [2 ]
机构
[1] Univ Cent Florida, CREOL, Coll Opt & Photon, Orlando, FL 32816 USA
[2] Univ N Carolina, Ctr Optoelect & Opt Commun, Charlotte, NC 28223 USA
[3] Kraetonics LLC, Melbourne Beach, FL 32951 USA
基金
美国国家科学基金会;
关键词
thin-film devices; spatial filters; transmission filters; diffractive optics; integrated optics; FILTER;
D O I
10.1117/1.3258651
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Interference filters have a defect layer incorporated within a photonic crystal structure and generate a narrow transmission notch within a wide stop band. In this paper, we propose and demonstrate wavelength-tunable spatial filters by introducing diffractive optical elements in the defect layer. The spectral transmission through the device was a function of the local defect layer thickness under broadband illumination. For each wavelength, the spatial transmission followed the contours of equal defect layer optical thickness. The devices were implemented by depositing a one-dimensional photonic crystal with a centrally integrated defect layer on a silicon substrate using plasma-enhanced chemical vapor deposition. The defect layer was lithographically patterned with charge 2, 8-level vortex structures. The spectral transmission peak and linewidth was characterized by separately illuminating each zone of diffractive element using a tunable laser source and compared with model simulations. The spatial transmission through the device was imaged onto a CCD camera. Triangular wedge-shaped zones with wavelength-dependent orientations were observed. These novel devices with spectrally tunable spatial transmission have potential applications in pupil filtering, hyperspectral imaging, and engineered illumination systems. (C) 2009 Society of Photo-Optical Instrumentation Engineers. [DOI: 10.1117/1.3258651]
引用
收藏
页数:3
相关论文
共 50 条
  • [41] Fabrication of aspherical micro-optical elements based on silicon anisotropic etching
    Chen, Sheng-Bin
    Li, Ji-Sai
    Zhang, Xin-Yu
    Bandaoti Guangdian/Semiconductor Optoelectronics, 2007, 28 (02): : 231 - 234
  • [42] Potential of dry etching for the fabrication of fused silica micro-optical elements
    Nussbaum, P
    Weible, KJ
    Rossi, M
    Herzig, HP
    MICROMACHINE TECHNOLOGY FOR DIFFRACTIVE AND HOLOGRAPHIC OPTICS, 1999, 3879 : 63 - 70
  • [43] Integrated Dielectric Micro-Optical Elements on VCSELs Using Grayscale Photolithography
    Kumar, Raman
    Lakomy, Katherine
    North, William
    Strzebonski, Pawel
    Choquette, Kent D.
    2021 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2021,
  • [44] A versatile method for fabricating Pancharatnam-Berry micro-optical elements
    Xiong, Jianghao
    Zhan, Tao
    Wu, Shin-Tson
    OPTICS EXPRESS, 2019, 27 (20) : 27831 - 27840
  • [45] Specification of aspherical surfaces used as refractive elements in micro-optical systems
    Beguelin, Jeremy
    Scharf, Toralf
    Noell, Wilfried
    Voelkel, Reinhard
    OPTICAL MODELING AND SYSTEM ALIGNMENT, 2019, 11103
  • [46] Selective surface smoothening of 3D micro-optical elements
    Schife, Helmut
    Chidambaram, Nachiappan
    Altana, Mirco
    Kirchner, Robert
    EMERGING PATTERNING TECHNOLOGIES, 2017, 10144
  • [47] Fabrication of micro-optical elements in fused silica with laser backside etching
    Japan Society of Mechanical Engineers (JSME),; Japan Society of Mechanical Engineers (JSME),; Manufacturing and Machine Tool Division; Manufacturing System Division (Japan Society of Mechanical Engineers):
  • [48] Fabrication of diffractive and micro-optical elements using microlens projection lithography
    Wu, MH
    Whitesides, GM
    ADVANCED MATERIALS, 2002, 14 (20) : 1502 - +
  • [49] Sol-gel prepared glass for micro-optical elements and arrays
    Haruvy, Y
    Gilath, I
    Maniewictz, M
    Eisenberg, N
    10TH MEETING ON OPTICAL ENGINEERING IN ISRAEL, 1997, 3110 : 696 - 705
  • [50] Femtosecond laser polymerization of hybrid/integrated micro-optical elements and their characterization
    Malinauskas, Mangirdas
    Zukauskas, Albertas
    Purlys, Vytautas
    Belazaras, Kastytis
    Momot, Andrej
    Paipulas, Domas
    Gadonas, Roaldas
    Piskarskas, Algis
    Gilbergs, Holger
    Gaidukeviciute, Arune
    Sakellari, Ioanna
    Farsari, Maria
    Juodkazis, Saulius
    JOURNAL OF OPTICS, 2010, 12 (12)