Touch and non-touch measurement instrument for surface profile with large range

With the development of many technology including super precision manufacture, nanometer, micro-electronics, information and life sciences, etc., it is elementary to measuring surface texture, step, groove, size of component array, shape and position, working gesture and dynamic position, etc. of micro-component and micro-system in these domains. In order to satisfying complication of measurement condition and extending application area, it is necessary to develop a kind of surface profile with large range and high resolution, which can not only measure in touch mode, but also non-touch one. This paper introduces this instrument, and its work principle Non-contact probe bases on an improved Foucault focus detection method, and contact measurement is found on inductance sensor with micro-force. The construction of system is originally used as a non-contact measurement instrument, and contact measurement is realized by inserting contact probe. They share in the volume motor, but trace independent electric zero position to realize displacement measurement of large range and high resolution.