Electrothermal characteristics of strained-Si MOSFETs in high-current operation

被引:9
|
作者
Choi, CH [1 ]
Chun, JH [1 ]
Dutton, RW [1 ]
机构
[1] Stanford Univ, Ctr Integrated Syst, Stanford, CA 94305 USA
关键词
bipolar current gain; device simulation; electrostatic discharge (ESD); fullband Monte Carlo simulation; phonon mean-free-path; self-heating problem; SiGe; strained-Si MOS;
D O I
10.1109/TED.2004.836542
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Electrothermal characteristics of strained-Si MOSFETs, operating in the high-current regime have been studied using device simulation. The phonon mean-free-path of strained-Si devices in the presence of high electric fields is determined based on fullband Monte Carlo device simulation. Strained-Si nMOS devices have higher bipolar-current gain and impact ionization rates compared to bulk-Si nMOS devices due to the smaller energy bandgap and longer phonon rnean-free-path. Even though strained-Si devices have self-heating problems due to the lower thermal conductivity of the buried SiGe layer, the devices can be used beneficially for electrostatic discharge protection devices to achieve lower holding voltage (V-h) and higher second breakdown triggering current (I-t2), compared to those of bulk-Si devices, owing to the high bipolar current gain and current uniformity.
引用
收藏
页码:1928 / 1931
页数:4
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