Evolution of structure and properties of multi-component (AlCrTaTiZr)Ox films

被引：77

作者：

Lin, Miao-I. ^{[1
]}

Tsai, Ming-Hung ^{[1
]}

Shen, Wan-Jui ^{[1
]}

Yeh, Jien-Wei ^{[1
]}

机构：

[1] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 30013, Taiwan

来源：

THIN SOLID FILMS | 2010年 / 518卷 / 10期

关键词：

High-entropy alloy; Multi-component oxide; Amorphous structure; Reactive sputtering; Hard coating; MECHANICAL-PROPERTIES; SUBSTRATE BIAS; THIN-FILMS; COATINGS; TEMPERATURE; DEPOSITION; CR; MICROSTRUCTURE; PERFORMANCE; TARGET;

D O I：

10.1016/j.tsf.2009.10.142

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

(AlCrTaTiZr)O-x films were deposited at 350 degrees C by DC magnetron sputtering from high-entropy alloy target. Oxygen concentration increases with oxygen flow ratio, and saturates near 67 at.%. As-deposited films have an amorphous structure. Their hardness fall in the range of 8-13 GPa. All amorphous oxide films maintain their amorphous structure up to 800 degrees C for at least 1 h. After 900 degrees C 5 h annealing, crystalline phases with the structures of ZrO2, TiO2, or Ti2ZrO6 form. Annealing enhances mechanical properties of the films. Their hardness and modulus attain to the values about 20 and 260 GPa, respectively. The resistivity of the metallic films is around 10(2) mu Omega cm but drastically rises to 10(12) mu Omega cm when oxygen concentration increases. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：2732 / 2737

页数：6

共 50 条

[31] Effect of substrate bias on the structure and properties of multi-element (AlCrTaTiZr)N coatings
Lai, Chia-Han
Lin, Su-Jien
Yeh, Jien-Wei
Davison, Andrew
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2006, 39 (21) : 4628 - 4633
[32] Micro structure, mechanical and tribological properties of novel multi-component nanolayered nitride coatings
Yang, Q
Zhao, LR
SURFACE & COATINGS TECHNOLOGY, 2005, 200 (5-6): : 1709 - 1713
[33] Issues of structure formation of multi-component construction materials
Sidorenko, Yulia
Korenkova, Sofia
Guryanov, Alexander
INTERNATIONAL SCIENCE CONFERENCE SPBWOSCE-2016 - SMART CITY, 2017, 106
[34] Bonding and structure in dense multi-component molecular mixtures
Meyer, Edmund R.
Ticknor, Christopher
Bethkenhagen, Mandy
Hamel, Sebastien
Redmer, Ronald
Kress, Joel D.
Collins, Lee A.
JOURNAL OF CHEMICAL PHYSICS, 2015, 143 (16):
[35] Multi-component magnetic field structure in solar flares
Lozitsky, VG
Staude, J
SOLAR POLARIZATION 3, 2003, 307 : 378 - 381
[36] The Morphology and Structure of Multi-component Polyurethane Macroporous Adsorbents
Kao Teng Hsueh Hsiao Hua Heush Hsueh Pao, 9 (1482):
[37] Structure analysis of multi-component pastes-The effect of water distribution on the rheological properties
Moller, Anna Cacilie
Lie-Piang, Anouk
Bian, Ting
van der Padt, Albert
van der Goot, Atze Jan
FOOD RESEARCH INTERNATIONAL, 2022, 162
[38] PHASE COMPLEX STRUCTURE PREDICTION FOR MULTI-COMPONENT SYSTEMS
KOSHKAROV, ZA
MOKHOSOEV, MV
GASANALIEV, AM
DOKLADY AKADEMII NAUK SSSR, 1989, 308 (04): : 889 - 893
[39] Structure and vibrational dynamics of multi-component chalcogenide glasses
Jain, KC
Khetarpal, M
Bhandari, D
Saxena, NS
DISORDERED MATERIALS - CURRENT DEVELOPMENTS -, 1996, 223 : 87 - 90
[40] Multi-component structure of solar and stellar transition regions
Peter, H
ASTRONOMY & ASTROPHYSICS, 2000, 360 (02): : 761 - 776

← 1 2 3 4 5 →