Characterization of ultrasonic spray pyrolysed ruthenium oxide thin films

被引：30
|
作者：
Patil, PS [1 ]
Ennaoui, EA [1 ]
Lokhande, CD [1 ]
Muller, M [1 ]
Giersig, M [1 ]
Diesner, K [1 ]
Tributsch, H [1 ]
机构：
[1] Hahn Meitner Inst Kernforsch Berlin GmbH, Bereich Phys Chem, D-14109 Berlin, Germany
来源：
THIN SOLID FILMS | 1997年 / 310卷 / 1-2期
关键词：
ultrasonic spray pyrolysis; thin films; ruthenium oxide;
D O I：
10.1016/S0040-6090(97)00335-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The ultrasonic spray pyrolysis (USP) technique was employed to deposit ruthenium oxide thin films. The films were prepared at 190 degrees C substrate temperature and further annealed al 350 degrees C for 30 min in air. The films were 0.22 mu thick and black grey in color. The structural, compositional and optical properties of ruthenium oxide thin films are reported. Contactless transient photoconductivity measurement was carried out to calculate the decay time of excess charge carriers in ruthenium oxide thin films. (C) 1997 Elsevier Science S.A.
引用
收藏
页码：57 / 62
页数：6
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