Study of Porous Silicon Prepared Using Metal-Induced Etching (MIE): a Comparison with Laser-Induced Etching (LIE)

被引:31
|
作者
Saxena, Shailendra K. [1 ]
Kumar, Vivek [2 ]
Rai, Hari M. [1 ]
Sahu, Gayatri [1 ]
Late, Ravikiran [1 ]
Saxena, Kapil [3 ]
Shukla, A. K. [3 ]
Sagdeo, Pankaj R. [1 ,4 ]
Kumar, Rajesh [1 ,4 ]
机构
[1] Indian Inst Technol Indore, Mat Res Lab, Discipline Phys, Sch Basic Sci, Indore 452017, Madhya Pradesh, India
[2] Univ Tuscia, Biophys & Nanosci Ctr, DEB CNISM, I-01100 Viterbo, Italy
[3] Indian Inst Technol Delhi, Dept Phys, Hauz Khas, New Delhi 110016, India
[4] Indian Inst Technol Indore, Mat Sci & Engn Grp, Indore 452017, Madhya Pradesh, India
关键词
Porous Silicon; Silicon nanostructures; Laser induced etching; Photoluminescence; RAMAN-SCATTERING; ETCHED SILICON; NANOWIRES; ARRAYS; LUMINESCENCE; SI; PHOTOLUMINESCENCE; DISSOLUTION; FABRICATION; MORPHOLOGY;
D O I
10.1007/s12633-014-9242-y
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Porous silicon (p-Si), prepared by two routes (metal induced etching (MIE) and laser induced etching (LIE)) have been studied by comparing the observed surface morphologies using SEM. A uniformly distributed smaller (submicron sized) pores are formed when MIE technique is used because the pore formation is driven by uniformly distributed metal (silver in present case) nanoparticles, deposited prior to the porosification step. Whereas in p-Si, prepared by LIE technique, wider pores with some variation in pore size as compared to MIE technique is observed because a laser having gaussian profile of intensity is used for porosification. Uniformly distribute well-aligned Si nanowires are observed in samples prepared by MIE method as seen using cross-sectional SEM imaging. A single photoluminescence (PL) peak at 1.96 eV corresponding to red emission at room temperature is observed which reveals that the Si nanowires, present in p-Si prepared by MIE, show quantum confinement effect. The single PL peak confirms the presence of uniform sized nanowires in MIE samples. These vertically aligned Si nanowires can be used for field emission application.
引用
收藏
页码:483 / 488
页数:6
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