Low pressure glow discharge in a system with hollow electrode at floating potential

被引：0
|
作者：
Babinov, N. A. [1 ]
机构：
[1] St Petersburg Electrotech Univ LETI, Dept Electron Devices & Syst, St Petersburg, Russia
来源：
VII CONFERENCE ON LOW TEMPERATURE PLASMA IN THE PROCESSES OF FUNCTIONAL COATING PREPARATION | 2016年 / 669卷
关键词：
D O I：
10.1088/1742-6596/669/1/012002
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
This article describes the research of the low pressure gas discharge in a system with hollow electrode at the floating potential. The main characteristic features of the discharge distinguishing it from the glow discharge with hollow cathode are described. The studied type of discharge has good perspective to use in the plasma emission systems allowing to reach high current efficiency of the ion sources.
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页数：4
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