Study on fabrication of polymer electrostatic comb-drive actuator by DXRL technique

被引：0

作者：

Li, Shipeng ^{[1
]}

Li, Yigui ^{[2
]}

Pham, Phuc Hong ^{[1
]}

Dao, Dzung Viet ^{[1
]}

Sugiyama, Susumu ^{[1
]}

机构：

[1] Ritsumeikan Univ, Fac Sci & Engn, Dept Microsyst Technol, 1-1-1 Noji-Higashi, Kusatsu, Shiga 525, Japan

[2] Ritsumeikan Univ, Res Org Sci & Engn, Kusatsu, Shiga 5258577, Japan

来源：

2006 IEEE INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE | 2006年

关键词：

D O I：

暂无

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

This paper reports a novel approach to fabricate poly-methyl-meth-acrylate (PMMA) electrostatic comb-drive actuator using the deep x-ray lithography (DXRL) technique. The designed actuator consists of 140 units of interdigitated parallel capacitors with the linger gap and width being 2 mu m and 4 mu m respectively, and the thickness of the structure is 200 mu m, which makes the aspect ratio 50:1. A brief description of the design and simulation with ANSYS are also presented in this paper.

引用

页码：57 / +

页数：2

共 50 条

[41] A photovoltaic pn junction micro vertical comb-drive actuator
Huang, Hsin-Yu
Hsu, Hsiu-Ting
Lin, Hung-Yi
Chiu, Yi
Fang, Weileun
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2010, 20 (10)
[42] A novel sequential engagement electrodes for vertical comb-drive actuator
Wu, Mingching
Lin, Hung-Yi
Chen, Rongshun
Fang, Weileun
PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2, 2007, : 136 - +
[43] The Investigation of Three Types of Comb-Drive Actuator for MEMS Inclinometer
Aung, Kyaw Myo
Simonov, Boris M.
Kalugin, Victor V.
Linn, Kyaw Zin
PROCEEDINGS OF THE 2018 IEEE CONFERENCE OF RUSSIAN YOUNG RESEARCHERS IN ELECTRICAL AND ELECTRONIC ENGINEERING (EICONRUS), 2018, : 1743 - 1745
[44] Influence of deep RIE tolerances on comb-drive actuator performance
Chen, Bangtao
Miao, Jianmin
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2007, 40 (04) : 970 - 976
[45] Pressure sensing by electrical admittance measurement of a comb-drive actuator
Ayanos, Kenjiro
Hashiguchim, Gen
IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, 2007, 2 (03) : 335 - 339
[46] Modeling and simulation of silicon micromechanical electrostatic comb-drive resonator
Yin, SM
Zhang, YK
Zhou, JM
2ND INTERNATIONAL CONFERENCE ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: ADVANCED OPTICAL MANUFACTURING TECHNOLOGIES, 2006, 6149
[47] Levitation compensation method for dynamic electrostatic comb-drive actuators
Timpe, S. J.
Hook, D. A.
Dugger, M. T.
Komvopoulos, K.
SENSORS AND ACTUATORS A-PHYSICAL, 2008, 143 (02) : 383 - 389
[48] Demonstration of Heterogeneous Structure for Fabricating a Comb-Drive Actuator for Cryogenic Applications
Xue, Gaopeng
Toda, Masaya
Li, Xinghui
Li, Bing
Ono, Takahito
MICROMACHINES, 2022, 13 (08)
[49] Temperature stability study of resonant angular scanning micromirrors with electrostatic comb-drive actuators
Cao, Yingchao
Wang, Peng
Li, Jianhua
Xie, Huikai
SENSORS AND ACTUATORS A-PHYSICAL, 2021, 318
[50] In-plane rotary comb-drive actuator for a variable optical attenuator
Hou, Max Ti-Kuang
Huang, Jing-Yi
Jiang, Shiue-Shr
Yeh, J. Andrew
Journal of Micro/Nanolithography, MEMS, and MOEMS, 2008, 7 (04):

← 1 2 3 4 5 →