The study on the compound X-ray refractive lens using LIGA technique

被引：1
|
作者：
Liang, JQ [1 ]
Le, ZC [1 ]
Peng, LQ [1 ]
Wang, WB [1 ]
Lan, WH [1 ]
Ming, AJ [1 ]
Yi, FT [1 ]
Ye, J [1 ]
Quan, BS [1 ]
Yao, JS [1 ]
Xuan, M [1 ]
Wang, LJ [1 ]
机构：
[1] Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, State Key Lab Appl Opt, Changchun 130031, Peoples R China
来源：
MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS II | 2004年 / 5641卷
关键词：
X-ray; compound lens; LIGA process; PMMA;
D O I：
10.1117/12.570760
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A theoretical method of focusing X-rays by the compound X-ray refractive lens is presented in this paper. The authors report their resent theoretical results including the material selection and structure parameters for such a device. As an example, a compound X-ray refractive lens with PMMA material is designed. The detailed fabrication process of the PMMA compound lens by LIGA technology is described. Moreover, some measured results by means of SEM are also shown. The structure height of one of the PMMA compound lens is measured to be 500mum.
引用
收藏
页码：48 / 55
页数：8
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