In-situ monitoring of PE-CVD growth of TiO2 films with laser Raman spectroscopy

被引：13
|
作者：
Nishida, K
Morisawa, K
Hiraki, A
Muraishi, S
Katoda, T
机构：
[1] Kochi Univ Technol, Dept Elect & Photon Syst Engn, Kochi 7828502, Japan
[2] JEOL Ltd, Tokyo 1968558, Japan
来源：
APPLIED SURFACE SCIENCE | 2000年 / 159卷
关键词：
in-situ monitoring; TiO2; PE-CVD; Raman spectroscopy; hetero-interface;
D O I：
10.1016/S0169-4332(00)00067-2
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
A new plasma-enhanced chemical vapor deposition (CVD) system with an in-situ monitoring system by laser Raman spectroscopy was developed by which it is possible to obtain Raman spectra even when the thickness of a TiO2 film is only about 27.5 Angstrom. A peak corresponding to titanium silicide was observed at the early growth stage of TiO2. It was made clear that titanium silicide decomposes with the process of growth and plays a role in the conversion of amorphous titanium dioxide to a crystalline one and enhances the growth of crystal. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：143 / 148
页数：6
相关论文
共 50 条
  • [21] CdS/TiO2 Nanocrystalline Films: In-situ Synthesis and Photoelectrochemical Performance
    Liu Can-Jun
    Chen Shu
    Li Jie
    JOURNAL OF INORGANIC MATERIALS, 2018, 33 (12) : 1343 - +
  • [22] In-situ Growth of TiO2 Nanosheets/Nanowires Controlled by Nanoporous Gold Membrane and TiO2 Nanoparticles
    Tao Jin
    Bu Yu
    Chen Aiying
    Wang Xianying
    RARE METAL MATERIALS AND ENGINEERING, 2019, 48 (08) : 2468 - 2473
  • [23] In-situ Growth of TiO2 Nanosheets/Nanowires Controlled by Nanoporous Gold Membrane and TiO2 Nanoparticles
    Tao, Jin
    Bu, Yu
    Chen, Aiying
    Wang, Xianying
    Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering, 2019, 48 (08): : 2468 - 2473
  • [24] In-situ Raman scattering in nanomaterial flame synthesis:: A case on TiO2 nanoparticle
    Liu, Xiaofei
    Nanoengineering: Fabrication, Properties, Optics, and Devices IV, 2007, 6645 : V6450 - V6450
  • [25] PE-CVD of F-doped SiO2 thin films using tetraisocyanatesilane and tetrafluorosilane
    Shirafuji, T
    Sawada, M
    Nakagami, Y
    Hayashi, Y
    Nishino, S
    LOW-DIELECTRIC CONSTANT MATERIALS II, 1997, 443 : 137 - 142
  • [26] An In-situ Real-Time Optical Fiber Sensor Based on Surface Plasmon Resonance for Monitoring the Growth of TiO2 Thin Films
    Tsao, Yu-Chia
    Tsai, Woo-Hu
    Shih, Wen-Ching
    Wu, Mu-Shiang
    SENSORS, 2013, 13 (07) : 9513 - 9521
  • [27] NO2 adsorption mechanism on TiO2: An in-situ transmission infrared spectroscopy study
    Sivachandiran, L.
    Thevenet, F.
    Rousseau, A.
    Bianchi, D.
    APPLIED CATALYSIS B-ENVIRONMENTAL, 2016, 198 : 411 - 419
  • [28] Fe2O3-TiO2 nanosystems by a hybrid PE-CVD/ALD approach: controllable synthesis, growth mechanism, and photocatalytic properties
    Barreca, Davide
    Carraro, Giorgio
    Warwick, Michael E. A.
    Kaunisto, Kimmo
    Gasparotto, Alberto
    Gombac, Valentina
    Sada, Cinzia
    Turner, Stuart
    Van Tendeloo, Gustaaf
    Maccato, Chiara
    Fornasiero, Paolo
    CRYSTENGCOMM, 2015, 17 (32): : 6219 - 6226
  • [29] In-situ Raman Spectroscopy for the In-Line Crystallization Monitoring of Entacapone
    Novak, P.
    Jednacak, T.
    Hrenar, T.
    Brkljaca, M.
    XXII INTERNATIONAL CONFERENCE ON RAMAN SPECTROSCOPY, 2010, 1267 : 720 - 721
  • [30] Growth of anatase TiO2 thin films by laser ablation
    Stankova, NE
    Atanasov, PA
    Dikovska, AO
    Dimitrov, IG
    Socol, G
    Mihailescu, I
    13th International School on Quantum Electronics: Laser Physics and Applications, 2005, 5830 : 60 - 64
12345