Glow Discharge Characteristics in Transverse Supersonic Air Flow

被引：12
|
作者：
Timerkaev, B. A. [1 ]
Zalyaliev, B. R. [1 ]
Saifutdinov, A. I. [2 ,3 ]
机构：
[1] Kazan Natl Res Tech Univ, Kazan, Russia
[2] Kazan Fed Univ, Kazan 420008, Russia
[3] St Petersburg State Univ, St Petersburg, Russia
来源：
VI SCIENTIFIC TECHNICAL CONFERENCE ON LOW-TEMPERATURE PLASMA DURING THE DEPOSITION OF FUNCTIONAL COATINGS | 2014年 / 567卷
关键词：
D O I：
10.1088/1742-6596/567/1/012032
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A low pressure glow discharge in a transverse supersonic gas flow of air at pressures of the order 1 torr has been experimentally studied for the case where the flow only partially fills the inter electrode gap. It is shown that the space region with supersonic gas flow has a higher concentration of gas particles and, therefore, works as a charged particle generator. The near electrode regions of glow discharge are concentrated specifically in this region. This structure of glow discharge is promising for plasma deposition of coatings under ultralow pressures
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页数：4
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