Properties of high-density (Pb, La) (Zr, Ti) O3 ceramics for sputtering targets

被引:2
|
作者
Hidaka, K
Hashiguchi, S
Nagayama, S
Kim, P
机构
[1] ULVAC Mat Technol Co Ltd, Dev Div, Kagoshima 8996301, Japan
[2] Vacuum Met Co Ltd, Dept Dev, Chiba 2891297, Japan
关键词
D O I
10.1016/S0042-207X(00)00301-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Lanthanum-modified lead zirconate titanate (PLZT) ceramics were fabricated by pressureless sintering without the usage of additives, and high purity (99.999%), high density (relative density > 98%), large size ( > phi 300 mm), and uniform distribution in density and composition were retained. Thermal desorption spectrometry (TDS) results under high vacuum, showed that these high-density PLZT ceramics sorbed less amount of gaseous components. From results of sputtering tests using these high-density targets, high deposition rate (85 nm min(-1)) was achieved with rf power 3 kW. Further, after rapid thermal annealing (RTA), the deposited films showed pure perovskite with (1 1 1) orientation. These results suggest that the high-density PLZT targets are potentially suitable for the use of mass production of electronic devices. (C) 2000 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:451 / 458
页数:8
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