Highly transparent Si-doped In2O3 films prepared on PET substrate using roll-to-roll sputtering

被引:7
|
作者
Cho, Da-Young [1 ]
Shin, Yong-Hee [1 ]
Kim, Han-Ki [1 ]
机构
[1] Kyung Hee Univ, Dept Adv Mat Engn Informat & Elect, Yongin 446701, Gyeonggi Do, South Korea
来源
关键词
Si-doped In2O3; Roll-to-roll sputtering; Amorphous; Transparent conducting oxide; Flexible organic solar cells; EFFICIENT;
D O I
10.1016/j.surfcoat.2013.12.060
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We investigated the characteristics of Si-doped In2O3 (ISO) films grown on polyethylene terephthalate (PET) substrates using a lab-scale roll-to-roll (RTR) sputtering system and their ability to function as flexible anodes in flexible organic solar cells (OSCs). Both electrical and optical properties of the flexible ISO films were critically dependent on the direct current power applied to the ISO target. Despite a process temperature lower than 50 degrees C, we obtained flexible ISO film with a sheet resistance of 144.4 Omega/square and an optical transparency of 81.21% at a wavelength of 550 nm. Due to the amorphous structure of the ISO films, they had a very smooth surface morphology without surface defects and showed good flexibility. Flexible OSCs fabricated on amorphous ISO anodes exhibited a power conversion efficiency of 1.932%. Successful operation of the flexible OSC with an ISO anode indicates that ISO film is a promising amorphous transparent and flexible electrode for flexible OSCs. (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码:109 / 112
页数:4
相关论文
共 50 条
  • [31] Transparent conductive polycrystalline Ti and H co-doped In2O3 films by RF sputtering technique
    Wang, G. H.
    Shi, C. Y.
    Zhao, L.
    Mo, L. B.
    Diao, H. W.
    Wang, W. J.
    2020 47TH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE (PVSC), 2020, : 712 - 714
  • [32] Chromaticity(b*), Sheet Resistance and Transmittance of SiO2-ITO Thin Films Deposited on PET Film by Using Roll-to-Roll Sputter System
    Park, Mi Young
    Kang, Bo Gab
    Kim, Jung Soo
    Kim, Hye young
    Kim, Hu Sik
    Lim, Woo Taik
    Choi, Sik Young
    KOREAN JOURNAL OF MATERIALS RESEARCH, 2011, 21 (05): : 255 - 262
  • [33] Transparent conductive In2O3:Mo thin films prepared by reactive direct current magnetron sputtering at room temperature
    Miao, WN
    Li, XF
    Zhang, Q
    Huang, L
    Zhang, ZJ
    Zhang, L
    Yan, XJ
    THIN SOLID FILMS, 2006, 500 (1-2) : 70 - 73
  • [34] Cathodoluminescence of undoped and Si-doped ε-Ga2O3 films
    Montedoro, V
    Torres, A.
    Dadgostar, S.
    Jimenez, J.
    Bosi, M.
    Parisini, A.
    Fornari, R.
    MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, 2021, 264
  • [35] Transparent conducting In2O3 thin films prepared by ultrasonic spray pyrolysis
    Lee, JH
    Park, BO
    SURFACE & COATINGS TECHNOLOGY, 2004, 184 (01): : 102 - 107
  • [36] Transparent conductive Hf-doped In2O3 thin films by RF sputtering technique at low temperature annealing
    Wang, G. H.
    Shi, C. Y.
    Zhao, L.
    Diao, H. W.
    Wang, W. J.
    APPLIED SURFACE SCIENCE, 2017, 399 : 716 - 720
  • [37] Transparent Ti-doped In2O3 films grown by linear facing target sputtering for organic solar cells
    Ju-Hyun Lee
    Han-Ki Kim
    Journal of the Korean Physical Society, 2013, 63 : 1160 - 1166
  • [38] Transparent Ti-doped In2O3 films grown by linear facing target sputtering for organic solar cells
    Lee, Ju-Hyun
    Kim, Han-Ki
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2013, 63 (06) : 1160 - 1166
  • [39] Role of Si Incorporation on the Transparent Conducting Properties of In2O3 Thin Films
    Dakhel, A. A.
    JOURNAL OF ELECTRONIC MATERIALS, 2020, 49 (03) : 2296 - 2301
  • [40] TIN-DOPED IN2O3 FILMS DEPOSITED BY RF-SPUTTERING
    FUJINAKA, M
    BEREZIN, AA
    THIN SOLID FILMS, 1983, 101 (01) : 7 - 10