Thin Film Diamond Advances the Semiconductor Industry

被引：0
|
作者：
Hickey, Diane P. [1 ]
Kane, Neil [1 ]
Carlisle, John [1 ]
机构：
[1] Adv Diamond Technol Inc, Romeoville, IL 60446 USA
来源：
ADVANCED MATERIALS & PROCESSES | 2010年 / 168卷 / 05期
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：56 / 57
页数：2
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