OPTIMIZATION OF MICROWAVE POWER TRANSFER FROM ELECTRIC FIELD TO THE PLASMA INSIDE AN MICROWAVE 915 MHz PLASMA SOURCE

被引：0

作者：

Miotk, R. ^{[1
]}

Jasinski, M. ^{[1
]}

Mizeraczyk, J. ^{[2
]}

机构：

[1] Polish Acad Sci, Szewalski Inst Fluid Flow Machinery, Gdansk, Poland

[2] Gdynia Maritime Univ, Gdynia, Poland

来源：

2016 INTERNATIONAL CONFERENCE ON ACTUAL PROBLEMS OF ELECTRON DEVICES ENGINEERING (APEDE), VOL 1 | 2016年

关键词：

DECOMPOSITION;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents an optimization of the waveguide-supplied coaxial-line-based nozzleless microwave plasma source. This field applicator operated at a frequency f equal to 915 MHz at an atmospheric pressure. The optimization objective was to maximize an efficiency of power transfer from electric field to plasma inside this device. In the optimization we used a model of plasma which was determined in this work.

引用

页数：8

共 50 条

[41] Dynamic Stark Spectroscopic Measurements of Microwave Electric Fields Inside the Plasma Near a High-Power Antenna
Klepper, C. C.
Isler, R. C.
Hillairet, J.
Martin, E. H.
Colas, L.
Ekedahl, A.
Goniche, M.
Harris, J. H.
Hillis, D. L.
Panayotis, S.
Pegourie, B.
Lotte, Ph.
Colledani, G.
Martin, V.
PHYSICAL REVIEW LETTERS, 2013, 110 (21)
[42] Ultrawideband Plasma Relativistic Microwave Source
P. S. Strelkov
V. P. Tarakanov
D. E. Dias Mikhailova
I. E. Ivanov
D. V. Shumeiko
Plasma Physics Reports, 2019, 45 : 345 - 354
[43] PROPERTIES OF A HELICAL MICROWAVE PLASMA SOURCE
SINGH, CM
SCHARER, JE
BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1971, 16 (11): : 1259 - &
[44] A dual microwave antenna plasma source
Kuwata, Yusuke
Kasuya, Toshiro
Miyamoto, Naoki
Yamamoto, Shun
Watanabe, Yuta
Wada, Motoi
2016 21ST INTERNATIONAL CONFERENCE ON ION IMPLANTATION TECHNOLOGY (IIT), 2016,
[45] Large volume microwave plasma source
Bowles, Jeffrey H.
Duncan, Dwight
Walker, David N.
Amatucci, William E.
Antoniades, John A.
Review of Scientific Instruments, 1996, 67 (02):
[46] Resonance microwave volume plasma source
Berezhetskaya, N. K.
Kop'ev, V. A.
Kossyi, I. A.
Malykh, N. I.
Misakyan, M. A.
Taktakishvili, M. I.
Temchin, S. M.
Lee, Young Dong
PLASMA PHYSICS REPORTS, 2007, 33 (07) : 602 - 612
[47] The SLAN - A new microwave plasma source
Lobe, C
Glossop, M
MICROELECTRONICS JOURNAL, 1997, 28 (03) : R19 - R23
[48] MICROWAVE PLASMA ION-SOURCE
YAFAROV, RK
TERENTEV, SA
TELITSYN, AP
BALAKIN, AO
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 1989, 32 (03) : 651 - 654
[49] Resonance microwave volume plasma source
N. K. Berezhetskaya
V. A. Kop’ev
I. A. Kossyi
N. I. Malykh
M. A. Misakyan
M. I. Taktakishvili
S. M. Temchin
Young Dong Lee
Plasma Physics Reports, 2007, 33 : 602 - 612
[50] Ultrawideband Plasma Relativistic Microwave Source
Strelkov, P. S.
Tarakanov, V. P.
Mikhailova, D. E. Dias
Ivanov, I. E.
Shumeiko, D. V.
PLASMA PHYSICS REPORTS, 2019, 45 (04) : 345 - 354

← 1 2 3 4 5 →