An accurate direct extraction technique for the MBVD resonator model

被引：0

作者：

Bjurström, J ^{[1
]}

Vestling, L ^{[1
]}

Olsson, J ^{[1
]}

Katardjiev, I ^{[1
]}

机构：

[1] Uppsala Univ, Angstrom Lab, SE-75121 Uppsala, Sweden

来源：

34TH EUROPEAN MICROWAVE CONFERENCE, VOLS 1-3, CONFERENCE PROCEEDINGS | 2004年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A fast method for direct parameter extraction has been developed and applied for characterizing film bulk acoustic resonators (FBAR). The modified Butterworth-Van Dyke (MBVD) model has been used to this end. The measured FBAR data is fitted to an analytical expression containing a set of unknown coefficients, which are then calculated by means of minimizing an error function. Once the coefficients are calculated, the lumped circuit elements in the MBVD model can be readily extracted. Further, since the model is only valid at near resonance frequencies a weight function is proposed. The presented extraction method in this work is fast, easy to implement and readily lends itself to computer automation.

引用

页码：1241 / 1244

页数：4

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